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Micro And Smart Systems : Technolgy And Modeling

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CHAPTER 1 INTRODUCTION
CHAPTER 2 MICRO SENSORS, ACTUATORS, SYSTEMS AND SMART MATERIALS : AN OVERVIEW
CHAPTER 3 MICROMACHINING TECHNOLOGIES
CHAPTER 4 MECHANICS OF SLENDER SOLIDS IN MICROSYSTEMS
CHAPTER 5 THE FINITE ELEMENT METHOD
CHAPTER 6 MODELING OF COUPLED ELECTROMECHANICAL SYSTEMS
CHAPTER 7 ELECTRONICS CIRCUITS AND CONTROL FOR MICRO AND SMART SYSTEMS
CHAPTER 8 INTEGRATION OF MICRO AND SMART SYSTEMS
CHAPTER 9 SCALING EFFECTS IN MICROSYSTEMS
CHAPTER 10 SIMULATION OF MICROSYSTEMS USING FEA SOFTWARE

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